Chemical Characterization and Electrical Properties of Indium Oxynitride Grown by Reactive Gas-Timing RF Magnetron Sputtering - A. Sungthong; P. Khomdet; S. Porntheeraphat; C. Hruanun; Amporn Poyai; J. Nukeaw (My University, 2010)
Keywords: Auger electron spectroscopy; Cavity magnetron; GaN-based semiconductor devices and materials