Optical band engineering of metal-oxynitride based on tantalum oxide thin film fabricated via reactive gas-timing RF magnetron sputtering - N. Khemasiri; S. Jessadaluk; C. Chananonnawathorn; S. Vuttivong; T. Lertvanithphol; M. Horprathum; P. Eiamchai; V. Patthanasettakul; A. Klamchuen; A. Pankiew; S. Porntheeraphat; J. Nukeaw (My University, 2016)
Keywords: Auger electron spectroscopy; Ellipsometry; Cavity magnetron; Semiconductor materials and devices