Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery - D. Chittinan; P. Buranasiri; T. Lertvanithphol; P. Eiamchai; V. Patthanasettakul; C. Chananonnawathorn; S. Limwichean; N. Nuntawong; A. Klamchuen; P. Muthitamongkol; P. Limsuwan; P. Chindaudom; et al. (My University, 2019)
Keywords: Ellipsometry; Semiconductor materials and devices