Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask - Jirawat Jantawong; Nithi Atthi; Chana Leepattarapongpan; Awirut Srisuwan; Wutthinan Jeamsaksiri; Kathirgamasundaram Sooriakumar; Anu Austin; Surasak Niemcharoen (My University, 2018)
Keywords: Array data structure; Advanced MEMS and NEMS Technologies