Tetramethyl Ammonium Hydroxide Etchant Improvement for Aluminum Passivation and Smooth of Silicon Surface - Kamonwan Suttijalern; Jirawat Prabket; Rangson Muanghlua; Surasak Niemcharoen (My University, 2019)
Keywords: Tetramethylammonium hydroxide; Silicic acid; Passivation; Tetramethylammonium; Ammonium hydroxide; Isotropic etching; Advanced MEMS and NEMS Technologies