Use of Neural Network to Model the Refractive Property of PECVD Silicon Nitride Films used to Prevent Water Permeability of Piezoresistive Pressure Sensor - Thongchai Thongvigitmanee; Arckom Srihapat; Charoenchai Khompatraporn; Adsada Jiraprayuklert; Wisut Titiroongruang (My University, 2010)
Keywords: Passivation; Piezoresistive effect; Semiconductor Lasers and Optical Devices