Physical Properties of Copper Films Deposited by Compact-Size Magnetron Sputtering Source with Changing Magnetic Field Strength - Nathaporn Promros; Phongsaphak Sittimart; Nattatip Patanoo; Sukrit Kongnithichalerm; Mati Horprathum; Worawan Bhathumnavin; Boonchoat Paosawatyanyong (My University, 2016)
Keywords: Cavity magnetron; Metal and Thin Film Mechanics