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Author: search.filters.author.Chakkaew, AnusornSubject: search.filters.subject.MEMS

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    Electrostatic control and new device handling consideration for MEMS manufacturing process
    (2012-01-01)
    Chakkaew, Anusorn
    ;
    Titiroongruang, Wisut
    Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.
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    Electrostatic control and the need of feedback control ionization in critical environment of MEMS manufacturing process
    (2010-01-01)
    Chakkaew, Anusorn
    ;
    Titiroongruang, Wisut
    This paper describes new electrostatic control countermeasures and solutions for critical electrostatic control environment for MEMS manufacturing processes, especially in MEMS's wafer handling that needs low electrostatic voltage. This includes personnel grounding methodology, ESD event measurement, and low ion imbalance ionization to support current and future needs of the MEMS. © (2010) Trans Tech Publications.