In this paper, evolution of optical and electrical properties of diamond-like carbon (DLC) films deposited by ECR-CVD system are reported. By varying the deposition different substrates bias (0,-55,-100 V) and volume amount of C2H2 from 40 to 55 cc onto substrate Si/TiN and quarts. The structure of the DLC films were analyzed from Raman spectroscopy. DLC films deposited bias at-100 V and C2H2 at 40 cc show excellent optical transmittance and high resistivity. As a result, ID/IG ratio corresponds to the optical transmittance and resistivity with ID/IG ratio decreased making the film like to the diamond. Most importantly, the transparency and resistivity properties of the DLC films can be tailored to approaching diamond by adjusting substrates bias and volume C2H2, is important to many applications, which is improve film properties.
