Search Results

Now showing 1 - 4 of 4

Some of the metrics are blocked by your
consent settings
Advanced material evaluations and considerations for electrostatic control in electronic device manufacturing
(2013-02-01)
Chakkaew, Anusorn
;
Suriya-Amaranont, Chaba
;
Titiroongruang, Wisut
Electrostatic potential and electrostatic discharge (ESD) has been a manufacturing issue for years, not only limited to semiconductor-based electronic devices, hard dish drive assemblies, but also to adjacent electronic device manufacturing such as microelectromechanical systems and nanoelectromechanical systems devices. This research presents a complete material testing and evaluations for electrostatic control in electronic device manufacturing. There are materials and system evaluations and considerations of electrostatic generation on personnel, personnel grounding through wrist strap and grounding wire, personnel grounding through constant wrist strap monitor, and with static control footwear and floorings. This research also presents machine grounding measurement and consideration with ground impedance, when ground noise is present, area where most regular ohm meter fails. Discharge simulation from device handling materials, and electrostatic discharge characterization of static control surfaces for small and light devices. © 2013 American Scientific Publishers All rights reserved.
Some of the metrics are blocked by your
consent settings
Electrostatic control and new device handling consideration for MEMS manufacturing process
(2012-01-01)
Chakkaew, Anusorn
;
Titiroongruang, Wisut
Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.
Some of the metrics are blocked by your
consent settings
Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing
(2012-01-01)
Chakkaew, Anusorn
;
Titiroongruang, Wisut
Electrostatic potential and electrostatic discharge (ESD) have been a factory issue for years, not only limited to semiconductor-based electronic devices, hard dish drive assemblies, and microelectromechanical systems and nanoelectromechanical systems devices, which are extremely sensitive to electrostatic field and the ESD. This paper presents ESD simulation and experimental analysis of electrostatic control in electronic device manufacturing. There are experiments of electrostatic on personnel, personnel grounding through wrist strap, through constant wrist strap monitor, and with static control footwear and floorings, machine grounding consideration, device handling materials, and ESD characterisation of static control surfaces for small and light devices. Copyright © 2012 Inderscience Enterprises Ltd.
Some of the metrics are blocked by your
consent settings
Electrostatic control and the need of feedback control ionization in critical environment of MEMS manufacturing process
(2010-01-01)
Chakkaew, Anusorn
;
Titiroongruang, Wisut
This paper describes new electrostatic control countermeasures and solutions for critical electrostatic control environment for MEMS manufacturing processes, especially in MEMS's wafer handling that needs low electrostatic voltage. This includes personnel grounding methodology, ESD event measurement, and low ion imbalance ionization to support current and future needs of the MEMS. © (2010) Trans Tech Publications.

KMITL

Browse

Filters

Settings

Sort By

Results per page

Search Results