Wongprasert, Yothin

Preferred name

Wongprasert, Yothin

Alternative Name

Wongprasert, Y.

Main Affiliation

School of Engineering

Email

yothin.wo@kmitl.ac.th

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The diamond crystal nucieation by combustion activation CVD
(2008-12-01)
Wongprasert, Y.
;
Muanghlua, R.
;
Sato, K.
This paper presents the diamond nucleation using combustion activation chemical vapor deposition (CACVD) by 0.95 volumetric ratio of O <sup>2</sup>/C<sup>2</sup>H<sup>2</sup> under atmospheric pressure. The main point of our work is to develop the CACVD technique for synthesize the semiconductor materials, which is developed for electronic devices application. The surface nucleation of substrate was studied by using surface pretreatment. The results of surface nucieation on mirror-silicon, polished silicon by diamond powder, silicon-dioxide (Sio<inf>2</inf>), and polished Sio<inf>2</inf> by diamond powder, are significantly different. It can be concluded that the silicon-dioxide mask technique is useful for nucleated diamond protection whereas the polished silicon by diamond powder is suitable for nucleated diamond generation. These techniques are applied for the pattern fabrication. © 2008 Trans Tech Publications, Switzerland.