Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

Abstract

Thin films of cobalt-doped ZnO were prepared by DC magnetron sputtering on glasses. The cobalt dopant concentration was at 3%wt. The sputtering power was set at 200 watts and sputtered for 20 mins. All films are transparent. The films were then annealed at 100-500 °C under air atmosphere. Crystal structural and optical properties of the films were characterized by XRD and UV-Vis, respectively. The XRD patterns show peaks corresponding to (002) plane indicate thin films obtain hexagonal wurtzite structure. The effects of annealing temperature on crystal structure and optical properties were discussed.