Impedance characteristics under different voltages of n-β-FeSi2/p-Si heterojunctions constructed via facing target sputtering

Abstract

Utilizing a substrate temperature of 600 °C, n-semiconducting iron disilicide (β-FeSi2)/p-silicon heterojunctions have been constructed with direct-current sputtering and a couple of facing FeSi2 targets. The impedance examination was carried out under a voltage ranging from −1 V to 1 V. Each complex impedance arch unveiled only one arc with its center beneath the real axis. Elevated voltage facilitates a reduction in the semicircle size. Based on the simulated equivalent circuit model, the heterojunctions possessed high parallel resistance and a constant phase element (CPE) at the grain boundary, raising the V. The CPE for the grain, grain boundary, and junction implied behavior close to the ideal capacitor. The dielectric loss tangent results indicated that the heterojunctions exhibited leakage behavior. From the alternating-current conductivity plots, the plateau and dispersion areas were revealed at low and high frequencies, respectively. The direct-current conductivity was 9.49 × 10−3 S cm−1 at −1 V and elevated to 8.87 × 10−2 S cm−1 at 1 V, due to the augmented charge carriers. Jonscher's power law fitting exposed that the constructed heterojunction exhibited short-range hopping within the boundary of the neighborhood.