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Effect of annealing varied temperature on electrical and optical properties of indium tin oxide films at oxygen atmosphere
Author(s)
Date Issued
October 22, 2009
Type
Conference Paper
Abstract
Indium tin oxide (ITO) films were deposited on non-heated glass slide which prepared by RF sputtering system at room temperature. The temperatures of annealing were varied at 200, 300, 400 and 500 Celsius, respectively. Effect of oxygen flow on properties of ITO films has been studied. The optical properties were characterized by UV-Vis spectrophotometer. Electrical properties were characterized by 4-point probe. The results show that transmittance and sheet resistance could be improved by heat treatment. We could get the minimum sheet resistance of 120 Ω/□ and over 85% of the average transmittance in visible light. ©2009 IEEE.
Citation
2009 6th International Conference on Electrical Engineering Electronics Computer Telecommunications and Information Technology Ecti Con 2009, 1, 486-488, 2009