Silicon Nitride Thin Films Deposited By Reactive Gas-timing Magnetron Sputtering For Protective Coating Applications

Thumbnail Image

Date

2015-06-01

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Auger electron spectroscopy

Citation

URI

https://dspace.kmitl.ac.th/handle/123456789/5169

Collections

All

Endorsement

Review

Supplemented By

Referenced By