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Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures
Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures
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Date
2024-03-25
Authors
Wenhao Chen
Huahuang Luo
Hadi Tavakkoli
Mingzheng Duan
Wibool Piyawattanametha
Yi-Kuen Lee
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https://dspace.kmitl.ac.th/handle/123456789/13432
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