Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

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dc.contributor.authorWenhao Chen
dc.contributor.authorHuahuang Luo
dc.contributor.authorHadi Tavakkoli
dc.contributor.authorMingzheng Duan
dc.contributor.authorWibool Piyawattanametha
dc.contributor.authorYi-Kuen Lee
dc.date.accessioned2025-07-21T06:11:05Z
dc.date.issued2024-03-25
dc.identifier.doi10.1088/1361-6439/ad3763
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/13432
dc.subject.classificationAdvanced MEMS and NEMS Technologies
dc.titleTheoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures
dc.typeArticle

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