Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

Thumbnail Image

Date

2018-12-31

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Array data structure

Citation

URI

https://dspace.kmitl.ac.th/handle/123456789/7997

Collections

All

Endorsement

Review

Supplemented By

Referenced By