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    Reversible thermally stimulated phase transition in amorphous–nanocrystalline β-V2O5 thin films for temperature-sensitive electronics
    (2026-01-01)
    Tipawan Khlayboonme, S.
    ;
    Fungfuang, Natasia
    ;
    Kitiwan, Mettaya
    V<inf>2</inf>O<inf>5</inf> thin films are significant for next-generation temperature-sensitive electronic devices owing to notable phase stability and reversibility. Optimizing phase characteristics toward reversible low-temperature transitions enhances device performance. In this study, thin films of amorphous–nanocrystalline β-V<inf>2</inf>O<inf>5</inf> were deposited on glass substrates using the inclined magnetron head in radio-frequency magnetron sputtering under an O<inf>2</inf> reactive gas. The effects of thermal stimulation (heating to 400 °C, followed by cooling) were investigated for an as-deposited film prepared at 7.5 % O<inf>2</inf> and for two annealed films deposited at 7.5 % and 10 % O<inf>2.</inf> The annealed films were annealed at 300 °C before thermal stimulation. The films were characterized by X-ray diffractometry (XRD), Auger-electron spectroscopy, field-emission electron microscopy, Van der Pauw and Hall effect measurements, and ultraviolet–visible spectroscopy. The as-deposited film exhibited insulating behavior, whereas the annealed films at 7.5 % and 10 % O<inf>2</inf> demonstrated n-type and p-type conductivities, respectively, accompanied by decreased intensity of the V LMM Auger peak. Before thermal stimulation, the as-deposited film was highly amorphous, whereas the annealed films comprised the β-monoclinic phase. Thermal stimulation caused mixed β-monoclinic and β-tetragonal symmetries for all films and induced significant changes in surface morphology, except for the annealed film at 7.5 % O<inf>2</inf>. Variations in carrier density and bandgap energy indicated that thermal energy promoted oxygen vacancies but reduced vanadium vacancies in the film structure. In situ XRD analysis demonstrated the phase stability and reversible formation of the nanocrystalline β-monoclinic phase, revealing potential for thermally responsive applications requiring repeatable phase behavior.
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    Transition between monoclinic and tetragonal β phases induced by reactive oxygen gas in RF-sputtered V2O5 thin films
    (2022-11-01)
    Khlayboonme, S. Tipawan
    Thin films of V<inf>2</inf>O<inf>5</inf> are promising materials for applications in chromogenic devices, such as gas sensors and contactless optical thermal sensors. Therefore, controlling the formation of the various phases of V<inf>2</inf>O<inf>5</inf> is important. The device performance, in relation to satisfactory coloration efficiency and fast response, strongly depends on the characteristics of the phase incorporated in the film structure. To better understand the phase formation in these films, thin films of V<inf>2</inf>O<inf>5</inf> were deposited by RF magnetron sputtering using an O<inf>2</inf>-reaction technique from a metallic V target, and the influence of RF power and O<inf>2</inf> levels on the transition between the β-monoclinic and β-tetragonal phase structures was investigated by X-ray diffractometer. The films were also evaluated using Auger-electron, Raman-, and UV-vis spectrometers to determine their composition, chemical, and electronic properties to assess the effects of the two sputtering parameters. The mechanism underlying the development of film properties is related to the plasma characteristics and species observed by optical emission spectroscopy. Increasing the RF power resulted in a higher phase content of the β-monoclinic and α-orthorhombic phase, whereas an increasing the oxygen levels induced a phase transition towards the β-tetragonal phase of V<inf>2</inf>O<inf>5</inf>. Films with different phase contents exhibited different optical energy bandgaps. Plasma diagnostics showed that increasing the RF power increased the thickness of plasma sheaths on the target surface. The thinner sheath on the target surface further increased the β-tetragonal phase content. The variation between β-monoclinic and β-tetragonal phase content was expected because of the bombardment of energetic O<sup>−</sup> ions that were accelerated from the plasma sheath toward the growth surface. A deeper understanding of the transition between β phases in V<inf>2</inf>O<inf>5</inf> films can enable better phase control, which can improve film application towards various sensing devices, particularly chromic- or temperature-sensors.