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  4. Extraction of mobility degradation, effective channel length and total series resistance of NMOS at elevated temperature
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Extraction of mobility degradation, effective channel length and total series resistance of NMOS at elevated temperature

Author(s)
Kiddee, Kunagone
Ruangphanit, Anucha
Niemcharoen, Surasak
Atiwongsangthong, Narin
Muanghlua, Rangson
Date Issued
August 12, 2011
Type
Conference Paper
DOI
10.1109/ECTICON.2011.5947755
Abstract
This article describes the extraction of total series resistance, effective channel length and low field effective channel mobility degradation parameter at temperature in the range of 25°C-125°C of NMOS device. The relation of IDS and VGS in a linear region was used with a different of channel length. The procedure is based on the measurement of the transconductance characteristics of MOSFET in the linear region. The transconductance characteristics is determine for the several devices of difference drawn channel length. The results shows that, the effective channel length is increased in a range of 5×10-10 m/°C. The low field mobility degradation parameter is decreased by the factor of 0.733. The total series resistance is increased in the range of 1.4 Ω-μm/°C. The errors between the predicted model and measured of IDS&V GS in linear region is approximately 3%. © 2011 IEEE.
Citation
Ecti Con 2011 8th Electrical Engineering Electronics Computer Telecommunications and Information Technology Ecti Association of Thailand Conference 2011, 2-5, 2011
Subjects

Channel length

Mobility

NMOS

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