Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

Thumbnail Image

Date

2019-06-20

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Tantalum pentoxide, Silicon oxynitride, Ellipsometry

Citation

URI

https://dspace.kmitl.ac.th/handle/123456789/8435

Collections

All

Endorsement

Review

Supplemented By

Referenced By